Vacuum Chamber 17.625 ID
Stainless steel vacuum chamber used for sputtering application. The chamber is 17.62" inside diameter. It is equipped with:
8) 2.75" conflat flange ports
1) 8" conflat flange port
(1) 10" conflat flange port.
The assembly spanning the middle of the chamber appears to be a sputtering target assembly which rotates allowing three separate targets to be used. It is electrically isolated from the main chamber assembly. The rotary motion feedthrough used to rotate the target assembly is water cooled. The main flanges of the chamber are .75" wide by 1" tall. One is flat the other has an o-ring groove and an o-ring in it.

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