Ion Beam Source Assembly is aluminum port plate mounted (21" OD) and equipped with numerous feedthrus including:
- (3) multi pin electrical feedthrus
- (1) water cooling feedthru
- (1) gas inlet feedthru with manual .25" Nupro valve
- (1) .25" shaft rotary motion feedthru
- Granville Phillips 275 convectron gauge tube
- (1) 1.5" viewable sight port
- (1) .75" compression fitting
- (2) spare blank ports.
The assembly can be used as a start for installing a Ion Source in an existing vacuum chamber.
External connections power supplies etc. must be sourced through an alternate supplier.