This is the 'sorter' module, complete with a pair of cassette boat elevators from a Nikon Optistation 3. The elevators accept wafer boat from 4 inches and 6 inches. I believe they can be configured to accept smaller size wafer boats as well. In addition to the two elevators, there is an elaborate wafer loading system for each cassette. A third system can move the wafers between the two loaders.

None of the cables have been cut leading to the module electronics, however vacuum lines leading to the module have been removed or cut. None of the control electronics are included, only what is visible in the photographs.


Photo set 1738.


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