Tropel 9000 Laser Interferometer

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This is a Tropel Model 9000 laser interferometer. It is used for checking the flatness of wafers and masks up to 5 inches in diameter. It uses a HeNe laser as a monochromatic source, and has a built-in video camera for fringe display on a Sony Black & White monitor.

The interferometer is in spectacular condition with the exception of a small scratch near the upper center of the reference prism (outside the field of view of all but the largest wafers). The wafers are held in place by a vacuum chuck and fringe spacing and direction is adjusted via three very fine setting screws located to either side and beneath the chuck holder.

The interferometer includes the following chucks:
� 2 inch vacuum chuck
� 3 inch vacuum chuck
� 4 inch vacuum chuck
� 5 inch ‘bow’ chuck

***MPN Model 9000
***OEM Tropel
***SKU*** 17698

A6R2 SKU: 17698 Category:

Description

This is a Tropel Model 9000 laser interferometer. It is used for checking the flatness of wafers and masks up to 5 inches in diameter. It uses a HeNe laser as a monochromatic source, and has a built-in video camera for fringe display on a Sony Black & White monitor.

The interferometer is in spectacular condition with the exception of a small scratch near the upper center of the reference prism (outside the field of view of all but the largest wafers). The wafers are held in place by a vacuum chuck and fringe spacing and direction is adjusted via three very fine setting screws located to either side and beneath the chuck holder.

The interferometer includes the following chucks:
� 2 inch vacuum chuck
� 3 inch vacuum chuck
� 4 inch vacuum chuck
� 5 inch ‘bow’ chuck

***MPN Model 9000
***OEM Tropel
***SKU*** 17698

Additional information

Weight 200.1 lbs
Dimensions 36 × 24 × 30 in